New optical profilometer for 3D surface metrology

Project news

VTT MIKES has acquired a state-of-the-art optical profilometer for high-resolution, non-contact 3D surface form and texture metrology. This instrument integrates confocal microscopy, coherence scanning interferometry, and active illumination focus variation, enabling fast and accurate surface measurements across a wide range of applications.

High-accuracy 3D surface measurements are essential for verifying the functionality, reliability, and performance of precision components. Surface form and microstructure directly influence mechanical fit, sealing, friction, wear resistance, lubrication efficiency, and component lifespan. Especially, accurate high-resolution measurements are crucial in fields like microelectronics and optics, where miniaturisation and precision matter, because even nanometre-scale deviations can impact the performance of components.

These 3D surface measurements support also quality assurance, compliance with ISO standards, and early detection of deviations, reducing failures and recalls. In manufacturing, accurate data on surface structure guides machining, polishing, and additive processes, optimizes production parameters, and ensures consistent quality.

The benefits of advanced 3D surface texture metrology extend to sectors including aerospace, automotive, medical devices, semiconductors, electronics, optics, and additive manufacturing. Applications range from engine components to implants, wafer flatness, lens quality, and verification of 3D-printed parts.

VTT MIKES has an excellent range of instruments from nanoscale to microscale and macroscale. The new instrument (Sensofar Neox 3D) fills the accuracy gap between these instrument classes with its measurement range from nanometre to millimetre range and provides versatile noncontact measurement capabilities. It will support research and calibrations and ensure reliable and traceable measurements in precision surface metrology. In particular, it enables us to offer our customers calibration of 3D surface texture artifacts, and traceable 3D measurements with sub-micrometre precision for larger, more complex shapes than previously possible. 

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Antti Lassila
Antti Lassila
Research Team Leader
Ville Heikkinen
Ville Heikkinen
Research Scientist