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MEMS sensors


An affordable solution for companies that wish to avoid the huge investment required to develop and produce advanced MEMS devices

VTT is known for its innovative, state-of-the-art MEMS devices. We design, model, simulate, fabricate and characterise silicon-based components and readout electronics, with a focus on surface and SOI MEMS technologies.

Together with Vaisala, we have developed the micromachined, electrically tunable VTT's Fabry-Perot Interferometer (FPI) – used in Vaisala's CARBOCAP®  Carbon dioxide sensor. This technology has enabled reliable and cost-effective gas sensing for over 15 years across a wide range of industries and applications, from building automation and safety to life sciences and ecological research.

MEMS silicon resonators and Fabry Perot filters are our flagship technologies

With MEMS technologies, it is possible to create new miniaturised instruments which surpass existing solutions in terms of performance, while enabling small size, low power consumption and low unit cost. As devices become smaller and more versatile, new and previously unseen applications will become possible.

We have experience in the design and fabrication of MEMS silicon resonators, magnetometers, various types of pressure sensors, monolithic integration of MEMS and CMOS, capacitive microphones, ultrasound transmitters and receivers, voltage references, acoustic emission sensors, accelerometers, electrostatically tuneable mirrors, NDIR gas sensors based on tuneable Fabry-Perot filters, thermopiles, and thermal emitters.

VTT's single-crystal silicon MEMS resonators are breaking into the timing and frequency control market and that of top-line quartz devices. VTT has selected an alternative approach to temperature compensation in resonators: the elastic properties of silicon can be tailored through optimised doping with phosphorus. This has been shown to result in quartz-class temperature stability.

MEMS sensors - from wearable devices and smart phones to industrial condition monitoring

Smart devices are created by combining sensor data with intelligent software. In the context of the Internet of Things, such devices will provide the indispensable interface between the virtual and physical worlds.

The system-based approach calls for integrated design and manufacturing based on different technologies, components and materials combined into one system. VTT can provide full-scale system solutions tailored to our customers' needs.

Our references 

Embedded intelligence in machinery »



Cleanroom facility for microelectronics

VTT is the provider of a world-class cleanroom facility. Micronova R&D cleanroom is fully equipped for the fabrication of silicon, glass and thin film-based microsystems.

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