Micronova – a sustainable multi-user semiconductor R&D piloting environment


VTT and Aalto University operate a sustainable multi-user semiconductor R&D cleanroom in the Micronova facilities in Espoo, Finland. The cleanroom is part of OtaNano, Finland’s national research infrastructure for micro-, nano- and quantum technologies. More than twenty external companies use the open access cleanroom facilities daily for their own R&D and piloting activities, making it a sustainable manufacturing option. Environmental actions are at the top of our agenda, and we have focused on reducing the footprint of the cleanroom for over a decade.

Key facts

The sustainable multi-user semiconductor piloting environment in Micronova supports the processing of different technologies including MEMS and MOEMS, superconducting quantum devices, RF components, integrated photonics devices, 2D materials and post-CMOS processed components, radiation detectors, thin film components, 3D integrated modules, wafer level packaging and back-end processes. 

More than 20 external companies use the 2,600m2 large open access cleanroom daily for their own R&D and piloting needs with their own personnel.

We offer the entire development cycle of micro-, nano- and quantum technology devices from material, device and process innovation to prototyping and small-scale manufacturing.

Jukka Korhonen
Jukka Korhonen
Solution Sales Lead, Microelectronics and Quantum Technology