MEMS-based Fabry-Perot interferometers
- Miniature, low-cost spectrometers and spectral imagers for high volume applications.
MEMS-based FPI tunable wavelength filters, modules and process platforms for visible, NIR, IR and thermal IR wavelengths.
- Optical apertures up to ~2 mm
- Superior mirror flatness
- Insensitive to vibrations or positioning
- Low operational voltages