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MEMS-based Fabry-Perot interferometers


  • Miniature, low-cost spectrometers and spectral imagers for high volume applications.
  • MEMS-based FPI tunable wavelength filters, modules and process platforms for visible, NIR, IR and thermal IR wavelengths.
  BENEFITSMEMS-based Fabry-Perot interferometers
  • Optical apertures up to ~2 mm
  • Superior mirror flatness
  • Insensitive to vibrations or positioning
  • Low operational voltages