Micronova center for applied micro and nanotechnology
VTT MEMSFAB is located in Micronova in Espoo Finland. Micronova features the largest R&D cleanroom in the Nordic countries. The Micronova facility is run jointly by VTT and Aalto University. It is part of Finland’s national research infrastructure for micro-, nano- and quantum technology - OtaNano.
Key facts about Micronova
Micronova features two cleanrooms, with processing capabilities for silicon-based CMOS, MEMS and photonics devices, 3D integration and thin film components.
We offer cleanroom services and the entire development cycle of micro- and nanofabrication from fundamental research to small-scale production.
The facility is located at the Otaniemi Technology Campus in Espoo, Finland, it is jointly run by VTT and Aalto University. entire development cycle of micro- and nanofabrication from fundamental research to small-scale production.
In Micronova, VTT conducts microelectronics related R&D. We develop innovative enabling technologies and apply them to practical micro and nanosystems. There are two cleanrooms, which together form the largest R&D cleanroom in the Nordic countries. Small scale semiconductor manufacturing is possible in Micronova through VTT MEMSFAB services.
Micronova is a central hub for the Finnish electronics industry ecosystem. The cleanrooms have processing capabilities for silicon-based CMOS, MEMS and photonics devices, as well as 3D integration and thin film components. In Micronova cleanrooms, our researchers innovate and develop new sensors, detectors, photonics components, passive RF components, PMUTs and other MEMS devices, as well as state-of-the-art quantum devices.
For our fab, we have dedicated maintenance, process engineering, quality and operations professionals who manage the execution of both R&D projects and manufacturing lots. We offer wafer processing on a wide range of materials and substrates – the company is certified to ISO 9001. We use techniques such as SPC and 8D problem solving in the fab.
VTT offers research and development of new materials, technologies, devices, systems and processes. We also offer small volume production services for customers, as well as access to VTT’s cleanroom and process equipment. VTT is unique as it can offer its customers and partners the entire development cycle from fundamental research and process development to prototyping and small-scale production.
Our services are customized according to our customers' needs. We also provide education and training in micro- and nanotechnologies.
- Research and Development
- Confidential Contract Research
- Material and Device Characterisation
- Education and Training
- Small to medium volume manufacturing via VTTMemsfab
- Cleanroom Services
- Access to Cleanroom Facilities