Micronova center for applied micro and nanotechnology


Micronova is located in Espoo, Finland and features the largest R&D cleanroom in the Nordic countries. The Micronova facility is run jointly by VTT and Aalto University. It is part of Finland’s national research infrastructure for micro-, nano- and quantum technology - OtaNano.

Key facts

Micronova features two cleanrooms, with processing capabilities for silicon-based CMOS, MEMS and photonics devices, 3D integration and thin film components.

We offer cleanroom services and the entire development cycle of micro- and nanofabrication from fundamental research to small-scale production.

The facility is located at the Otaniemi Technology Campus in Espoo, Finland, it is jointly run by VTT and Aalto University. 

Tommi Suni
Tommi Suni
Customer Account Lead