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Silicon MEMS resonators


  • Silicon MEMS oscillators that can compete with quartz TCXO applications.
  • Temperature compensated silicon resonators. Elastic properties of silicon can be tailored through optimized doping with phosphorus. This has been shown to result in quartz-class temperature stability.
  BENEFITSSilicon MEMS resonators
  • Small intrinsic temperature drift
  • Small component size
  • High k2 and large pulling range