Silicon MEMS resonators


  • Silicon MEMS oscillators that can compete with quartz TCXO applications.
  • Temperature compensated silicon resonators. Elastic properties of silicon can be tailored through optimized doping with phosphorus. This has been shown to result in quartz-class temperature stability.
  BENEFITSSilicon MEMS resonators
  • Small intrinsic temperature drift
  • Small component size
  • High k2 and large pulling range
Tel.+358 20 722 7070
Opening hours Mon - Fri 9:00 - 11:00 and 12:00 - 15:00, UTC +3 time zone