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Piezo-actuated Fabry-Perot interferometers

 

  NEED
  • Customized high-performance spectrometers and spectral imagers.
  SOLUTION
  • Separately assembled high-performance piezo-actuated tunable filter structures and modules for visible, NIR, IR and thermal IR wavelengths.
  BENEFITS
  • Large aperture sizes, ~20 mm
  • Accurate gap control through integrated capacitance measurement
  • Easily customizedPiezo-actuated Fabry-Perot interferometers
  PATENT PUBLICATIONS
    
  PUBLICATIONS