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MEMS pressure sensors

 

  NEED
  • Custom sensors for absolute and differential pressure measurement.  
  SOLUTION
  • Low power MEMS pressure sensor based on capacitive surface micromachined technology with an excellent shock resistance.
  BENEFITS
  • Ultra thin, narrow and mosaic structure, which enables custom specified form factor
  • Demonstrated to be extremely sensitive, linear and stable
  PATENT PUBLICATIONS
    
  PUBLICATIONS