M. Putkonen, P. Heikkilä, A.T. Pasanen, H. Rautkoski, L. Svärd, P. Simell, M. Vähä-Nissi, T. Sajavaara Atomic layer deposition of Ti-Nb-O thin films onto electrospun fibers for fibrous and tubular catalyst support structures Citation: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 36, 01A102 (2018); View online: https://doi.org/10.1116/1.4999826
L. Svärd, M. Putkonen, E. Kenttä, T. Sajavaara, F. Krahl, M. Karppinen, K. Van de Kerckhove, C. Detavernier, P. Simell, Low-Temperature Molecular Layer Deposition Using Monofunctional Aromatic Precursors and Ozone-Based Ring-Opening Reactions, Langmuir. 2017 33(38) 9657-9665. https://doi.org/10.1021/acs.langmuir.7b02456
S. Mohrdiek, M. Fretz, R. Jose James, G. Spinola Durante, T. Burch, A. Kral, A. Rettenmaier, R. Milani, M. Putkonen, W. Noell, M. Ortsiefer, A. Daly, V. Vinciguerra, C. Garnham, D. Shah, Active implant for optoacoustic natural sound enhancement, Optogenetics and Optical Manipulation Proceedings Volume 10052; 100520K (2017); https://doi.org/10.1117/12.2251912
J. Vartiainen, Y. Shen, T. Kaljunen, T. Malm, M. Vähä-Nissi, M. Putkonen, A. Harlin, Bio-based multilayer barrier films by extrusion, dispersion coating and atomic layer deposition J. Appl. Polym. Sci. 2016, 133, 42260. https://doi.org/10.1002/app.42260
K. Pfeiffer, S. Shestaeva, A. Bingel, P. Munzert, L. Ghazaryan, C. van Helvoirt, W.M.M. Kessels, U.T. Sanli, C. Grévent, G. Schütz, M. Putkonen, I. Buchanan, L. Jensen, D. Ristau, A. Tünnermann, A. Szeghalmi, Comparative study of ALD SiO2 thin films for optical applications, Optical Materials Express, 6 pp. 660-670 (2016). https://doi.org/10.1364/OME.6.000660
Thin Films on Silicon: ALD, R.L. Puurunen, M.Putkonen, in Thin Films on Silicon Handbook of Silicon Based MEMS Materials and Technologies: Second Edition eds. M. Tilli, T. Motooka, V.-M. Airaksinen, S. Franssila, M. Paulasto-Kröckel, V. Lindroos Elsevier, 2015 , pp. 154 - 163. https://doi.org/10.1016/B978-0-323-29965-7.00006-3
Antibacterial and barrier properties of oriented polymer films with ZnO thin films applied with atomic layer deposition at low temperatures, M. Vähä-Nissi, M. Pitkänen, E. Salo, E. Kenttä, A. Tanskanen, T. Sajavaara, M. Putkonen, J. Sievänen, A. Sneck, M. Rättö, M., Karppinen, A. Harlin, Thin Solid Films, 2014, 562, 331-337. https://doi.org/10.1016/j.tsf.2014.03.068