40 years ago, Dr. Tuomo Suntola and his group demonstrated the growth of ZnS
thin films in alternating, saturating gas-solid reactions. This initiated the
development of Atomic Layer Deposition (ALD) in Finland and gradually led to
industrial and academic activities worldwide. The famous patent on Atomic
Layer Epitaxy (FIN 52359) was filed on November 29, 1974.
Celebrating the round years, the Academy of Finland’s Finnish Centre of
Excellence on Atomic Layer Deposition, led by professor Markku Leskelä of the
University of Helsinki, is organizing an exhibition: “40 Years of ALD in
Finland: Photos, Stories”. Initially, the exhibition was organized for the
international Baltic ALD conference, May 12-13, 2014, Helsinki (http://www.aldcoe.fi/bald2014/).
The main organizers of the exhibition have been Dr. Riikka Puurunen (VTT) and
Dr. Jaakko Niinistö (University of Helsinki).
The exhibition material can be viewed at
- VTT, Micronova,
Tietotie 3, Espoo (Mon-Fri 8:00 - 16:30), from May 12 until the end of 2014
and
- University of Helsinki, Chemicum, A.I. Virtasenaukio 1, Helsinki
(Mon-Fri 7:45 - 19:00), from August 15 to October 15, 2014
- The
exhibition has also visited ALD 2014 conference in Kyoto, Japan, in June (http://www.ald2014.org/).
Page updated November 11, 2014
