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Silicon MEMS resonators

 

  NEED
  • Silicon MEMS oscillators that can compete with quartz TCXO applications.
  SOLUTION
  • Temperature compensated silicon resonators. Elastic properties of silicon can be tailored through optimized doping with phosphorus. This has been shown to result in quartz-class temperature stability.
  BENEFITSSilicon MEMS resonators
  • Small intrinsic temperature drift
  • Small component size
  • High k2 and large pulling range
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  PUBLICATIONS
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Emailinfo@vtt.fi
Tel.+358 20 722 7070
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P.O. Box 1000, FI-02044 VTT, Finland
Tel. exchange +358 20 722 111
Opening hours Mon - Fri 8:00 - 16:30,
UTC +3 time zone

CUSTOMER SERVICE

info@vtt.fi
Tel. +358 20 722 7070
Opening hours Mon - Fri 9:00 - 11:00 and 12:00 - 15:00,
UTC +3 time zone