Page Content NEED Ultra small-size energy storage for integrated mobile and zero-power autonomous devices. SOLUTIONAn extremely efficient small-size micro-supercapacitor, which can be integrated directly inside a silicon microcircuit chip. BENEFITSHigh energy and power density: enables storing energy of as much as 0.2 joule and impressive power generation of 2 watts on a one square centimeter silicon chipLeaves the surface of the chip available for active integrated microcircuits and sensors PATENT PUBLICATIONS WO2016059296, WO2013128082 PUBLICATIONSPrunnila et al. (2016) Conformal titanium nitride in a porous silicon matrix: A nanomaterial for in-chip supercapacitors HTML 2 HTML 3 HTML 4 HTML 5 HTML 6
